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Written by Administrator
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Wednesday, 27 May 2009 05:44 |
 System configuration to fit number of measurement MSM (DC multi-source/ measure=current/ voltage, output/ monitor) board consists of 4 MSMs with independent 5W high output. 1 unit comprises 10 MSM boards, with a total of 40 MSMs. The system can be upgraded according to measurement volume up to 5 units (2OO MSMs). Upgrade can be done by adding units. Precision current and voltage impression and measurement Current at 9 ranges, measurement resolution of maximum current ±1OOmA, and minimum current ±1pA. Voltage at 2 ranges, resolution of maximum voltage ±50V and minimum voltage 1 mV, enabling wide and precise impression and measurement. Measurement at minimum 10 msec Delivers high-speed measurement for multiple channels. Measures at top speed of lO msec per 40 channels, while acquiring data. Various evaluation items The TDDB Evaluation System is configured for wafer level and liquid crystal glass substrate level, by effectively systemizing DC multisource/ measure. It also applies for requirements of QDB evaluation and TZDB evaluation, while FET property evaluation can also be realized by exchanging software. | Voltage range | Resolution | Accuracy | Max current | | ±10V | 1mV | ±(0.2%+10mV) | 100mA | | ±50V | 10mV | ±(0.2%+50mV) | 100mA | | | Current range | Resolution | Accuracy | Max current | | ±100mA | 100μA | ±(0.5%+100μA+2μAx Vo) | 50V | | ±10mA | 10μA
| ±(0.5%+10μA+200nAx Vo) | | ±1mA | 1μA | ±(0.5%+1μA+20nAx Vo) | | ±100μA | 100nA
| ±(0.5%+100nA+2nAx Vo) | | ±10μA | 10nA | ±(1.0%+10nA+200pAx Vo) | | ±1μA | 1nA
| ±(1.0%+1nA+20pAx Vo) | | ±100nA | 100pA | ±(1.0%+100pA+2pAx Vo) | | ±10nA | 10pA | ±(2.0%+10pA+200fAx Vo) | | ±1nA | 1pA | ±(2.0%+1pA+20fAx Vo) | | | Accuracy: ±(set value or % of specified value) ±(offset), Vo: output voltage (V) | | | | | | | Model | AMM-1000 | | Application | OS: Windows NT TDDB Evaluation System | Voltage/current
application range | -50V to +50V/-100mA to +100mA | | Resolution | 1mV step/1pA step | Voltage/current
measurement range | -50V to +50V/-100mA to +100mA | Number of
measurement channels | Standard 40ch. Max. installment 200ch | Measurement
sampling speed | By measurement averaging setting
Short mode: 0 to 100msec →10msec interval
100msec to 100sec →100msec interval
Over 100sec → 1sec interval
Medium mode: 0 to 100msec →20msec interval
100msec to 100sec →100msec interval
Over 100sec → 1sec interval
Long mode: 100msec interval
Short mode: Data acquisition without averaging
Medium Long mode: Averaging per 1cycle | External dimension
of system | System controller | W650x H1300x D800mm | | Control rack | W570x H1100x D900mm | | Required utility | AC100V±10% 50/60Hz 15Ax l | | AC100V±10% 50/60Hz 50Ax l | |
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Last Updated on Wednesday, 27 May 2009 06:02 |
